Height resolution is a value in the field of topographic measurements. The height resolution is given in micrometers (µm). It always has the same functioning and resembles the classical height measurement of topographic realities outdoors or in buildings.

The height resolution is calculated with the help of contactless optical measuring sensors. The main elements in this calculation are usually the distance sensors that focus the white light on the measurement object. The height of the measured object is determined through the spectral distribution of the dispersed light on the surface. Various measuring heads are available for the various applications of height resolution measurement. A height resolution measurement in terms of nanometres is also possible.